Abstract : experiments were made on a ultrasonic machining tool with work - piece adhered to ultrasonic transducer head , to machine micro - holes on hard and brittle materials such as soda glass and si , to study the effects of tool materials ， work - piece materials ， amplitude ， machining load ， slurry concentration ， tool length and the size of work - piece on machining rate and wear ratio . in this experiment , the micro - tool was made through wedg 文摘:通过以wedg放电加工手段制作微细超声加工用工具，在采用工件加振方式的微细超声加工机上对碳酸玻璃、半导体硅等硬脆材料试件进行微孔加工的实验，来探讨在某一特定加工条件下工具材料、工件材料、工件的振幅、加工静载荷、磨料悬浮液浓度、工具长度及工件尺寸等重要因素对加工速度、工具损耗率的影响，为微细超声加工技术的实用化提供参考依据。
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